
Center for Xray Lithography - CXRL (3500)

Username: SANCHEZ
Password: 
                  Welcome to CXRL VAX 3500 VMS 5.1-1

Backups are now being done automatically after midnight including weekends.

Please purge unneeded files regularly to conserve disk space.

April 16
I have added print queues called src_c_portrait and cxrl_portrait.  The queues
cxrl_ansi and src_c_ansi have been changed to cxrl_landscape and 
src_c_landscape.  Cxrl_portrait is now the default queue.

Paul A.
    Last interactive login on Sunday, 29-JUL-1990 16:15
    Last non-interactive login on Friday, 27-JUL-1990 13:40

$ SET DEF [.NEW.DEMO.MOSAIC]
$ SHADOW
 
 
 
 
 
Defining Logical Names and Environmental Parameters
Graphic device set at TT:. Enter $SETPLOT to modify.


All SHADOW logical names and command defined.
Type $NEWS for more info on SHADOW.

$!
$! Let's calculate a simple trace of a single graphite mosaic crystal of
$! 0.4 deg fwhm of mosaicity and 1mm thick. We'll use a very simple
$! source for visualize the results
$!

$!
$! VERY IMPORTANT: When using mosaic crystals you MUST USE Cm as unit.
$!


$BRAGG
All crystal structures are refered to a cubic unit cell.
Bravais lattice type : 
0	for 	ZincBlende
1	for 	Rocksalt
2	for	simple FCC
3       for     CsCl structure
hexagonal Bravais lattice type: 
4       for     Hexagonal Close-Packed structure
5       for     Hexagonal Graphite structure
Then ? 
5
Lattice constant a (Angs) ? 
2.456
Lattice constant c (Angs) ? 
6.696
Index of crystal plane of reflection H,K,L : 
0
0
2
**********************************************************
 GRAPHITE structure 
**********************************************************
Enter atomic symbol (capitalized) for the basis atom :
CC
***********************************************************
Atomic scattering factor is defined by fo + f' + if", where
    fo = fo(SIN(theta)/Lambda) is the non-dispersive part
    f', f" (Lambda) are the dispersive part.
***********************************************************
We need fo at 3 different values of SIN(theta)/Lambda, which
should cover the range of interest and center around :
SIN(theta)/Lambda =   0.1493428912783752     ratio.
***********************************************************
Please enter 1) SIN(theta)/Lambda, 2) fo ,
For basis atom, first set : 
.1,5.126
              , second set : 
.15,4.358
              , third set : 
.2,3.581
***********************************************************
f', f" is furnished from optical constant library within ...
minimum photon energy (eV) : 
2900
maximum photon energy (eV) : 
3100
energy step (eV) : 
10
Do you want to include crystal absorption [1/0] ? 
1
Temperature (Debye-Waller) factor : 
1
Output file name (for SHADOW) : 
C3.002
Do you want to generate a rocking curve [1/0] ? 
1
... at what energy (eV) ? 
3000
 
So far, we are working with:
Lambda 		 =    4.132840000000000     Angstroms
Theta (graz) 	 =    38.11269892945504     degrees
Bragg angle      =    38.11900100880112     degrees
Structure factor  =  (17.85812708476999,0.3098358677173354)
Refraction index = 1 - delta - i*beta :
           delta =   5.3404535087259175E-05
            beta =   6.7854365522223289E-07
Absorption coeff =    206.3189247477408     cm-1
 
Do you want to calculate a mosaic crystal ?
1
mosaic angle spread (FWHM) [deg] ? 
.4
thickness of the crysatl [cm] ? 
.1
Do you want to try another energy [1/0] ? 
0

$ TY ROCK_CURVE.PAR
Graphite structure :
For atom basis, fo + f' + if" =  (4.464531771192498,7.7458966929333859E-02)
Lattice constant A =   2.456000000000000     Angstroms
Lattice constant C =   6.696000000000000     Angstroms
d-spacing        =    3.348000000000000     Angstroms
Photon energy  =    3000.000000000000     eV
Lambda 		 =    4.132840000000000     Angstroms
SIN(theta)/Lambda =   0.1493428912783752     ratio.
Refraction index = 1 - delta - i*beta :
           delta =   5.3404535087259175E-05
            beta =   6.7854365522223289E-07
Absorption coeff =    206.3189247477408     cm-1
Temperature factor =    1.000000000000000    
Structure factor F(000) =  (24.38552087467506,0.3098358677173354)
Structure factor F(hkl) =  (17.85812708476999,0.3098358677173354)
The width of the Rock Curve is
1/2 width for s-pol  =  :   0.0000000000000000E+00 microradians
1/2 width for p-pol  =  :   0.0000000000000000E+00 microradians
Theta (graz) 	     =    38.11269892945504     degrees
Bragg angle(corr)   =    38.11900100880112     degrees
  
***********  MOSAIC PARAMETERS  ***************
  
spread=   0.4000000000000000    deg fwhm
thickness=   0.1000000000000000    cm
true absorp lenght =    29.91534952722162     microns   !This is the lenght
							!due to the usual
							!absorption coefficient

peak thickness =   3.7516242754614042E-02 cm
For parallel polarization we have: 
   Q 	 =    1.504349140998572     cm-1 
   lenght prim ext =   1.038053793081009     microns	!this is the lenght
							!due to the perfect 
							!crystal diffraction.
							!We suppose than this
							!lenghr is much biger
							!than the small crystal
							!block size.

   lenght secn ext =   30.55230181773011     microns	!This is the 
							!responsible of the 
							!beam penetration
							!inside the crystal.
   abs coef prim ext =   5945.840946826092    cm-1
   abs coef secn ext =   202.0176019709063    cm-1
   peak refl =   0.2646983489489246    
For perpendicular polarization we have: 
   Q     =   8.5286090538017978E-02 cm-1 
   lenght prim ext =   4.359684658771876     microns
   lenght secn ext =   538.9076777360691     microns
   abs coef prim ext =   1415.722289796960    cm-1
   abs coef secn ext =   11.45298722378195    cm-1
   peak refl =   2.6314039990479217E-02
  
$ GO SOURCE


  :::::::  :::    ::            :::    :::::::        :::::     :::  ::  ::
 ::::::::  :::    ::           ::::    ::::::::      :::::::    :::  ::  ::
:::        :::    ::          ::: :    :::   :::    :::    ::   :::  ::  ::
:::        :::    ::         ::: ::    :::    ::    :::    ::   :::  ::  ::
 :::::::   :::::::::        :::  ::    :::    ::    :::    ::   :::  ::  ::
  :::::::  :::::::::       :::   ::    :::    ::    :::    ::   :::  ::  ::
       ::  :::    ::      :::    ::    :::    ::    :::    ::   :::  ::  ::
      :::  :::    ::     :::     ::    :::   :::    :::   :::   ::: ::: :::
::::::::   :::    ::    :::      ::    ::::::::      :::::::     :::::::::
:::::::    :::    ::   :::       ::    :::::::        :::::       ::: :::




VERSION     88.2                                               1 June  1988




Hit <RETURN> when ready: PROMPT

SOURCE selected. Begin procedure.

This procedure generates a SOURCE for SHADOW.
Mode selected [ ? <ret> for HELP ] ? : PROMPT
Call to INPUT

---------------------------------- S H A D O W  ------------------------------- 
Jun 1988                                         F.Cerrina        ECE - UW      

Defining source : 
When prompted for a yes/no answer, you may enter:
for   YES  answer      Y, 1
for   NO   answer      anything else




Do you want a verbose [ 1 ] or terse [ 0 ] output ?
1

------------- SOURCE SPECS ------------------
Options available:
Random in  BOTH REAL and MOMENTUM space		      0
Grid       BOTH					      1
Grid       REAL, random  MOMENTUM	              2
Random     REAL,  grid   MOMENTUM		      3
Ellipses in PHASE space, random around each ellipse   4
Ellipses in PHASE space,   grid around each ellipse   5
Source modelling type [ 0-5 ] ? 
0
How many rays [ 1 - 5 000 ] ? 
500
Seed [ odd, 1000 - 1 000 000 ] ? 
6343663
				
Do you want to optimize the source ? 
0
Source type : [ 0 ] regular source
              [ 1 ] wiggler
              [ 2 ] undulator
Then ? 
0

 The source is specified in the laboratory reference frame. The program will then rotate the set of 
rays in the mirror frame.

Type of source,now.

         use  ( 0 ) for point source  
              ( 1 ) for rectangular s.
              ( 2 ) for elliptical  s.
              ( 3 ) for gaussian    s.

X-Z plane source type [ 0-3 ] ? 
0

Source depth. The actual source will be centered on the no-depth position. Use 
         	(1) for no depth,
         	(2) for flat depth distribution,
         	(3) for gaussian depth distribution,
                (4) for a synchrotron source depth distr.

                   	Then ? 
Source Depth [ 1-4 ] ? 
1


O.K., got it so far.
         Source distribution now. We may use 
             ( 1 ) for a flat source
             ( 2 )       uniform   s.
             ( 3 )       gaussian  s.
             ( 4 )       synchrotron 
             ( 5 )       conical 
             ( 6 )       exact synchrotron 

Source Angle Distribution [ 1-6 ] ? 
1
Horizontal half-divergence [ (+)x, rads ] ? 
0
   					!No horizontal divergence.
                           [ (-)x, rads ] ? 
0
Vertical                   [ (+)z, rads ] ? 
.0005
					!the vertical divergence
                           [ (-)z, rads ] ?     !of the source is about
.0005
					!than mosaic spread.We will
Do you want a Photon energy [ Y/N ] ? 		!be inside the rock curve
1
						!acceptance.
We have these choices :
Single line ......................... 1
Several lines ....................... 2
Uniform source....................... 3
Energy distribution [ 1-3 ] ? 
1
Photon Energy [ 0 ] or Angstroms [ 1 ] ? 
0
Energy [ eV ] ? 
3000

Do you want to store the optical paths (OPD) [Y/N] ? 

Do you want to generate the A vectors (electric field) [Y/N] ?

Exit from INPUT_SOURCE

Generated          250 rays out of          500
                   500
Exit from SOURCE
SOURCE => Source has been succesfully generated.

SOURCE procedure completed.

Shadow:: TRACE


Ray Tracing Selected. Begin procedure.


Mode selected [ ? <ret> for HELP ] ? : PROMPT
PROMPT selected.
Call to RESET
Exit from RESET

Mode selected is: 
PROMPT                                                                          
Options: to start anew                 [ 0 ] 
            to restart from a given OE [ 1 ] 
Then ? 

Call to INPUT_OE


---------------------------------- S H A D O W  ------------------------------- 
Jun 1988                                         F.Cerrina        ECE - UW      
 
When prompted for a yes/no answer, you may enter:
for   YES  answer      Y, 1
for   NO   answer      anything else
 

Defining Optical Element:  1
Continue ? [ ^Z or %EXIT to terminate OS ] 



Do you want a verbose [ 1 ] or terse [ 0 ] output ?
1
You may save disk space by not writing out the  intermediate STAR or MIRR data f
iles. In general you will not need them unless you have specific needs (footprin
ts, etc.) 
 
Files to write out. Options: 
All............................ [ 0 ] 
Mirror only.....................[ 1 ] 
Image at CP only................[ 2 ] 
None............................[ 3 ] 
 Then ? 
0

	Let's define the optical or central axis of the system
for this particular optical element.
	By this I mean a "virtual" line that runs throughout
the optical system. Along this line are located the 
"continuation" planes, where the OS is subdivided in the
individual OE. This line does not have to coincide with the
true optical axis, as it is used mainly for bookeeping the
data, but it helps greatly in the data analysis if this
identity is preserved as everything in the program is referredto it.
	Once established, you still have complete freedom of
"moving" around the mirrors. 
In the case of a grating, you will have several choices. The 
program may override your specifications for the central axis 
and locate the source and image at the "best" position. 
You will be prompted later for this option.
It is recommended to use CM as units. This is not critical for
 most cases, but it is in the case of diffraction elements.
Optical Element definition:
Incidence Angle ? 

Source Distance ? 
1000
Reflection Angle? 

Image Distance  ? 
1000
Reflector [ 0 ] or refractor [ 1 ] ? 
0

Lets define the mirror. I may compute its parameters, like the
radius or the axes. This will not affect the rest of the calcu
lations; all the geometrical parameters may be modified later.
Or, you may wish to specify the mirror parameters yourself.


What kind of surface are we dealing with ?
spherical    = 1
elliptical   = 2
toroidal     = 3
paraboloid   = 4
plane        = 5
Codling slit = 6
hyperbolical = 7
cone	      = 8
polynomial   = 9

Mirror surface [ 1-9] ? 
5
Is the mirror Cylindrical ? 
0
Is this optical element a Fresnel Zone Plate ? 
0
Are we dealing with a Grating ? 
0

Are we dealing with a crystal [ Y/N ] ? 
1
File containing crystal parameters ?
C3.002
Is it a mosaic crystal [ Y/N ] ? 
1
I assume that the mosaic crystal small blocks follow a gaussian
distribution of a given FWHM spread.This spread must be much
larger than the rock curve width. I suposse that the distance
between intercepts on the mosaic surface will be larger enough
than the small mosaic block size.I use a random seed to gene-
rate the gaussian distribution of the blocks around the sur-
face normal.I also need the thickness of the whole crystal
(faces must be parallel) for the reflectivity calculation.
Mosaic crystal force us to use cm as unit.
What is the mosaic spread FWHM [deg] ? 
0.4
What is the crystal thickness [cm] ? 
0.1
Give me a random seed [odd, integer] ? 
328719
				!Be careful here when use two mosaic
					!crystals. You must use different 
					!seed for each crystal, otherwhise
					!an unphysical cancellation of the
					!divergences will be produced.
					
Automatic Tuning of Crystal [ Y/N ] ?
1
You must then supply the wavelength (or photon energy) at 
which you want the crystal tuned.
Energy, in eV, [ 0 ] or wavelength, in Angs., [ 1 ] ? 
0
Photon Energy ? 
3000
Is the mirror convex [ Y/N ] ? 
0
Reflectivity of Surface. SHADOW may solve the Fresnel equations locally.
Available options:'No reflectivity              .......... 0 
Full polarization dependence .......... 1 
No        "           "      .......... 2 
Reflectivity mode [ 0,1,2 ] ? 



Mirror orientation angle. Angles are measured CCW, in deg,
referring to the mirror normal. Alpha=0 is the mirror
sitting at the origin, facing up. Alpha = 90 is the 
mirror standing at your right and facing left when you 
look along the beam STANDING ON THE PREVIOUS MIRROR and so on.
Orientation Angle [ Alpha ] ? 


Mirror Dimensions finite [ Y/N ] ?


 The Optical Element and the the relative mirror are now fully 
defined. The mirror pole is now located at the "center" of the 
optical element. It is possible to override this situation and 
"move" the mirror without affecting the rest of the system.
 It is also possible to move the "source" without affecting the
rest of the system.
 The movements are expressed in the DEFAULT Mirror Ref. Frame.
 so that if you move BOTH source and mirror the relative
movement is the vector sum of the individual ones.
A word of caution: SOURCE movements and MIRROR movements are
NOT equivalent from the point of view of the whole system.
Do you want to move the Source [ Y/N ] ? 

   
--- Mirror rotations and position. ---
We define three angles, as rotations around the three axis.
These rotation are  defined in the program as corrections to
the mirror nominal position; that is, they modify the mirror
position relative to the Default Mirror Reference Frame, where
all the calculations are performed. Remember that rotations
do NOT commute. I apply them in the same order of entry.
CW ROTATIONS are (+) angles. A translation can be also applied to the mirror.
Do you want to move the mirror itself [ Y/N ] ? 

Distorted surface [ Y/N ] ? 


Any screens in this OE [ Y/N ] ? 


Slit at continuation plane [ Y/N ] ? 

Extra Image plates [ Y/N ] ? 

File containing the source array ? 
BEGIN
Exit from INPUT
Tracing optical element #            1
Call to SETSOUR
Exit from SETSOUR
Call to IMREF
Exit from IMREF
Call to OPTAXIS
Exit from OPTAXIS
Call to MSETUP
Exit from MSETUP
Call to RESTART
Exit from RESTART
Call to MIRROR
Exit from MIRROR
Call to IMAGE
Exit from IMAGE
Call to RESET
Exit from RESET

Do you want to change input mode ? 
0
Call to INPUT_OE



---------------------------------- S H A D O W  ------------------------------- 
Jun 1988                                         F.Cerrina        ECE - UW      

Defining Optical Element:  2
Continue ? [ ^Z or %EXIT to terminate OS ] 

End of session

 
Procedure completed. Return to COMMAND level
 

Procedure completed.

Shadow:: EXIT


Exit to DCL

$ MIRINFO


-------------------- M I R I N F O ----------------------
                  vs. 2.1 - Feb 1989 
 
MINFO> Mirror descriptor file. It must be an END.xx type.
MINFO> Please input filename: 
END.01
MINFO> File read correctly.
MINFO> Title ?
MOSAIC CRYSTAL FWHM=.4DEG 0.1CM 3KEV
MINFO> Comment ?

MINFO> Output file ?
MIRR.LIS
MINFO> Prepare output to file : MIRR.LIS                        
$ TY MIRR
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++ 
********************   MIRROR  DESCRIPTION   ********************
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++ 
MOSAIC CRYSTAL FWHM=.4DEG 0.1CM 3KEV                                            
                                                                                
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++ 
Input file specified:END.01                                  
Full file Specification :D2:[SANCHEZ.NEW.DEMO.MOSAIC]END.01;15                       
Creation Date           :29-JUL-1990 16:34
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++ 

Surface figure was defined as:        PLANE               
Cylindrical figure                      NO
Element type                            REFLECTOR
Element type                            CRYSTAL
Lattice Spacing                          3.3479999999999999E-08
Bragg Reflection from                  
C3.002                                                                          
MOSAIC Crystal selected                
Mosaic crystal spread (st. dev)  [DEG]   0.1702127659574468    
Mosaic crystal thickness [cm]            0.1000000000000000    
Reflectivity      ON     coefficients from: 
C3.002                                                                          
Polarization dependence                 YES
Mirror dimensions                       UNLIMITED
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++ 
Central Axis parameters :
Source Plane Distance                      1000.000000000000    
Image  Plane                               1000.000000000000    
Incidence Angle                            51.88720145631946    
Reflection/Diffraction Angle               51.88720145631946    
 
Mirror parameters                       COMPUTED
Same configuration as Central Axis      NO
Objective focus at                        0.0000000000000000E+00
Image focus at                            0.0000000000000000E+00
Incidence angle                           0.0000000000000000E+00
Parameters used follow:
   Plane mirror 
Source of this O.E. moved               NO
Mirror at pole position ( no mov. )     YES
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++ 
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++ 
$ INTENS
File for Intensity calculations ? 
STAR.01
Read          500rays.
Each ray has           12 entries.
Total intensity is :   131.9842281246552    
Normalized intensity is :  0.2639684562493105 !Notice than normalized 
Options:				      !intensity is about the peak   
Intensity transmitted/reflected ....... 0     !reflectivity, because the 
Intensity absorbed .................... 1     !source divergence<mosaic
Local reflectivity/transmission ....... 2     !spread and we are almost at
 Then ? 				      !the center of the reflectivity
					      !curve
$ PLOTXY

PLOT> Input file? 
STAR.01
PLOT> Options --- Enter
PLOT>   0   for excluding the losses
PLOT>   1   for including only the losses
PLOT>   2   for including all the rays.
PLOT> Then ? 
2
PLOT> Comment for plot [ 80 char ] ?


PLOT> File read OK. Full specifications:
     D2:[SANCHEZ.NEW.DEMO.MOSAIC]STAR.01;15                      
     Was created : 29-JUL-1990 16:34
 
PLOT>  Found          500 good points out of         500
PLOT>  The following columns are defined for each ray :
       1)  the regular columns [1-12]



Col Par Minimum:       Maximum:       Center:        St. Dev.:

 1  X    -12.814         10.118       -0.11490         3.8004    
 2  Y   -0.28538E-13    0.25331E-13   -0.11036E-14    0.95940E-14
 3  Z   -0.37762E-01   -0.15372E-03   -0.68916E-02    0.58674E-02
 4  X'  -0.12821E-01    0.10114E-01   -0.11493E-03    0.38005E-02
 5  Y'   0.99992         1.0000        0.99999        0.00000E+00
 6  Z'  -0.49812E-03    0.49854E-03    0.18517E-04    0.28978E-03
11   Photon Energy  (eV)      3000.0         3000.0    
20   Numerical Aperture      0.73720E-04    0.12831E-01
 

<ctlY>

Notice from here that:
1) the X interval is no nul even if the source has no horizontal divergence
   That's because the mosaic spread (see also that X' is no zero)
2) The dimension of the image along Z is near zero, because a mosaic 
   crystal has a focussing effect on the diffraction plane in 1:1 magnification
   configuration (sometimes called parafocussing).There is only an aberration
   effect and also the effect of the depth penetration of the beam inside
   the crystal
*******************************************************************************
*******************************************************************************

  Let's go forth and change to a white source to see the effects

*******************************************************************************
*******************************************************************************


$ RECOLOR
File for input ?
BEGIN
and for output ?
BEGIN
Data ready. Read          500 points.
Are you going to specify energies in eV [ 0 ] or wavelengths in angstroms [ 1 ] 
?
0
Available options :
1	single line
2	multi lines
3	box distribution
Then ?
3
Minimum value ?
2995
Maximum value ?
3005
Enter seed for random number generator :
12967161
All done.
$ GO TRACE


Ray Tracing Selected. Begin procedure.

Mode selected [ ? <ret> for HELP ] ? : MENU
MENU selected.
Execute existing SYSTEMFILE ? : 1
Call to RESET
Exit from RESET


Mode selected is: 
MENU                                                                            
Options: to start anew                 [ 0 ] 
            to restart from a given OE [ 1 ] 
Then ? 

Tracing optical element #            1
Call to SETSOUR
Exit from SETSOUR
Call to IMREF
Exit from IMREF
Call to OPTAXIS
Exit from OPTAXIS
Call to MSETUP
Exit from MSETUP
Call to RESTART
Exit from RESTART
Call to MIRROR
Exit from MIRROR
Call to IMAGE
Exit from IMAGE
Call to RESET
Exit from RESET

 
Procedure completed. Return to COMMAND level
 


Procedure completed.

Shadow:: EXIT


Exit to DCL


$! Let's plot vertical height (Z) vs energy at the source to see the focussing
$! effect, that sends different energies to a different places



$ PREPLOT
PREPLOT> Input file ? 
STAR.01
Read                  500 rays.
Each ray has           12 entries.
PREPLOT> How many columns to write out ? 
2
Row [1-12]  : the individual column
Row   [20]  : R = SQRT(X**2 + Y**2 + Z**2)
Row   [21]  : angle from the Y-axis
Row   [22]  : the magnitude of A vector
Row   [23]  : A**2
PREPLOT> Row # 1 : 
11
PREPLOT>       2 : 
3
Option:    Angstroms        [ 0 ] 
           Electronvolts    [ 1 ] 
           Cm-1             [ 2 ] 
PREPLOT> Then ? 
1
Options --- Enter
0 for excluding the losses
1 for including losses at a particular O.E.
2 for plotting all the rays .
3 for plotting ONLY the losses (all of them)
4 for plotting ONLY the losses at a given O.E.
PREPLOT> Then ? 
2
***********
Found          500 good points out of         500
Output options :
  [ 0 ] store rays in a file
  [ 1 ] plot directly on screen
  [ 2 ] both
Then ? 
0
PREPLOT> Output file ? 
IMAGE.TOP

$! Use now topdrawer to visualize IMAGE.TOP and you will see a straight
$! inclinated line. In this case that the penetration inside the crystal is
$! small (see secondary extinction lenght in ROCK_CURVE.PAR) the line is thin.
$! You may retrace the same with an energy about 8KeV and you will see how
$! this line become thicker because the beam penetration inside the crystal
$! is more important.

