g_id24-E-WL-Si-a3.slp initial p (m) q (m) Theta (mrad) 31 1.5 3 Optimize Slope errors optimization Slope errors to target ellipse p (m) q(m) Optimized Theta (mrad) p (m) q(m) Theta (mrad) 31 1.553 3 31 1.5 3 x(mm) slope error (urad) x(mm) height error (nm) x(mm) slope error (urad) x(mm) height error (nm) -450 -1.641 -450 -315.062 -450 8.805 -450 -2412.056 -449 -2.76 -449 -319.183 -449 7.671 -449 -2404.324 -448 -4.065 -448 -322.774 -448 6.351 -448 -2396.053 -447 -4.775 -447 -326.858 -447 5.626 -447 -2388.283 -446 -5.208 -446 -331.602 -446 5.177 -446 -2381.19 -445 -4.684 -445 -336.274 -445 5.686 -445 -2374.04 -444 -3.883 -444 -340.323 -444 6.472 -444 -2366.283 -443 -3.688 -443 -343.883 -443 6.651 -443 -2358.051 -442 -3.681 -442 -347.313 -442 6.642 -442 -2349.706 -441 -2.896 -441 -350.338 -441 7.412 -441 -2340.97 -440 -1.834 -440 -352.466 -440 8.459 -440 -2331.353 -439 -1.311 -439 -353.799 -439 8.966 -439 -2320.957 -438 -0.406 -438 -354.417 -438 9.855 -438 -2309.862 -437 0.055 -437 -354.366 -437 10.301 -437 -2298.112 -436 0.249 -436 -353.964 -436 10.48 -436 -2286.027 -435 1.068 -435 -353.067 -435 11.283 -435 -2273.463 -434 1.095 -434 -351.755 -434 11.294 -434 -2260.499 -433 1.382 -433 -350.192 -433 11.566 -433 -2247.301 -432 5.365 -432 -346.562 -432 15.533 -432 -2232.051 -431 6.315 -431 -340.58 -431 16.467 -431 -2214.464 -430 5.493 -430 -334.455 -430 15.629 -430 -2196.751 -429 5.433 -429 -328.732 -429 15.554 -429 -2179.455 -428 5.442 -428 -323.05 -428 15.547 -428 -2162.215 -427 5.496 -427 -317.336 -427 15.585 -427 -2144.96 -426 5.625 -426 -311.533 -426 15.698 -426 -2127.632 -425 5.683 -425 -305.645 -425 15.74 -425 -2110.234 -424 5.437 -424 -299.817 -424 15.478 -424 -2092.912 -423 6.74 -423 -293.463 -423 16.765 -423 -2075.081 -422 7.586 -422 -286.102 -422 17.595 -422 -2056.257 -421 6.809 -421 -278.719 -421 16.803 -421 -2037.429 -420 4.909 -420 -272.616 -420 14.887 -420 -2019.895 -419 4.231 -419 -267.767 -419 14.193 -419 -2003.633 -418 4.057 -418 -263.346 -418 14.003 -418 -1987.814 -417 5.027 -417 -258.542 -417 14.956 -417 -1971.628 -416 5.812 -416 -252.919 -416 15.725 -416 -1954.64 -415 4.912 -415 -247.358 -415 14.809 -415 -1937.729 -414 3.648 -414 -242.823 -414 13.529 -414 -1921.861 -413 3.348 -413 -239.047 -413 13.212 -413 -1906.768 -412 3.823 -412 -235.22 -412 13.671 -412 -1891.639 -411 3.513 -411 -231.339 -411 13.346 -411 -1876.474 -410 2.567 -410 -228.069 -410 12.383 -410 -1861.935 -409 1.676 -409 -225.695 -409 11.476 -409 -1848.309 -408 1.225 -408 -223.973 -408 11.008 -408 -1835.352 -407 1.73 -407 -222.242 -407 11.497 -407 -1822.401 -406 1.842 -406 -220.231 -406 11.593 -406 -1809.186 -405 1.522 -405 -218.307 -405 11.256 -405 -1796.076 -404 1.602 -404 -216.485 -404 11.32 -404 -1783.084 -403 2.137 -403 -214.383 -403 11.838 -403 -1769.828 -402 1.716 -402 -212.209 -402 11.401 -402 -1756.516 -401 2.529 -401 -209.836 -401 12.197 -401 -1743.023 -400 2.474 -400 -207.123 -400 12.126 -400 -1729.206 -399 1.838 -399 -204.737 -399 11.473 -399 -1715.733 -398 1.172 -398 -202.981 -398 10.79 -398 -1702.905 -397 0.985 -397 -201.64 -397 10.586 -397 -1690.51 -396 1.326 -396 -200.247 -396 10.911 -396 -1678.079 -395 0.922 -395 -198.899 -395 10.491 -395 -1665.71 -394 0.363 -394 -197.999 -394 9.914 -394 -1653.805 -393 0.739 -393 -197.176 -393 10.274 -393 -1641.995 -392 1.584 -392 -195.75 -392 11.102 -392 -1629.599 -391 3.007 -391 -193.223 -391 12.508 -391 -1616.118 -390 3.336 -390 -189.847 -390 12.821 -390 -1601.804 -389 2.95 -389 -186.481 -389 12.417 -389 -1587.518 -388 2.382 -388 -183.577 -388 11.832 -388 -1573.711 -387 1.788 -387 -181.219 -387 11.222 -387 -1560.465 -386 2.72 -386 -178.698 -386 12.136 -386 -1547.075 -385 3.315 -385 -175.467 -385 12.715 -385 -1532.991 -384 2.874 -384 -172.132 -384 12.257 -384 -1518.821 -383 3.377 -383 -168.755 -383 12.743 -383 -1504.626 -382 3.353 -382 -165.167 -382 12.702 -382 -1490.236 -381 2.965 -381 -161.768 -381 12.297 -381 -1476.052 -380 2.835 -380 -158.605 -380 12.15 -380 -1462.123 -379 3.388 -379 -155.246 -379 12.685 -379 -1448.013 -378 3.528 -378 -151.56 -378 12.808 -378 -1433.594 -377 3.405 -377 -147.859 -377 12.667 -377 -1419.177 -376 3.179 -376 -144.345 -376 12.424 -376 -1404.964 -375 2.117 -375 -141.451 -375 11.345 -375 -1391.39 -374 2.043 -374 -139.072 -374 11.254 -374 -1378.346 -373 3.734 -373 -135.943 -373 12.928 -373 -1364.571 -372 3.557 -372 -132.087 -372 12.734 -372 -1350.086 -371 3.7 -371 -128.219 -371 12.859 -371 -1335.606 -370 3.409 -370 -124.44 -370 12.55 -370 -1321.232 -369 2.715 -369 -121.141 -369 11.839 -369 -1307.356 -368 2.179 -368 -118.427 -368 11.285 -368 -1294.082 -367 2.672 -367 -115.729 -367 11.761 -367 -1280.843 -366 3.557 -366 -112.369 -366 12.629 -366 -1266.958 -365 4.19 -365 -108.283 -365 13.244 -365 -1252.365 -364 3.645 -364 -104.149 -364 12.682 -364 -1237.742 -363 3.028 -363 -100.566 -363 12.046 -363 -1223.686 -362 2.715 -362 -97.441 -362 11.716 -362 -1210.108 -361 2.603 -361 -94.537 -361 11.586 -361 -1196.767 -360 2.463 -360 -91.759 -360 11.429 -360 -1183.571 -359 2.458 -359 -89.052 -359 11.405 -359 -1170.463 -358 2.521 -358 -86.324 -358 11.451 -358 -1157.351 -357 2.382 -357 -83.643 -357 11.295 -357 -1144.305 -356 1.797 -356 -81.301 -356 10.691 -356 -1131.615 -355 2.136 -355 -79.058 -355 11.013 -355 -1119.042 -354 3.208 -354 -76.159 -354 12.066 -354 -1105.832 -353 2.791 -353 -72.956 -353 11.631 -353 -1092.335 -352 2.033 -352 -70.298 -352 10.856 -352 -1079.401 -351 1.804 -351 -68.11 -351 10.609 -351 -1066.955 -350 2.336 -350 -65.792 -350 11.122 -350 -1054.397 -349 2.389 -349 -63.203 -349 11.157 -349 -1041.586 -348 2.135 -348 -60.684 -348 10.886 -348 -1028.864 -347 2.896 -347 -57.921 -347 11.629 -347 -1015.915 -346 2.896 -346 -54.829 -346 11.61 -346 -1002.656 -345 1.419 -345 -52.413 -345 10.115 -345 -990.089 -344 2.24 -344 -50.28 -344 10.918 -344 -977.826 -343 3.668 -343 -47.109 -343 12.327 -343 -964.541 -342 3.313 -342 -43.427 -342 11.954 -342 -950.765 -341 2.305 -341 -40.384 -341 10.928 -341 -937.646 -340 1.543 -340 -38.193 -340 10.147 -340 -925.397 -339 1.742 -339 -36.286 -339 10.328 -339 -913.45 -338 2.047 -338 -34.145 -338 10.615 -338 -901.288 -337 2.468 -337 -31.644 -337 11.018 -337 -888.784 -336 2.851 -336 -28.755 -336 11.381 -336 -875.911 -335 2.652 -335 -25.774 -335 11.164 -335 -862.964 -334 2.437 -334 -22.987 -334 10.931 -334 -850.229 -333 2.269 -333 -20.395 -333 10.744 -333 -837.709 -332 1.879 -332 -18.085 -332 10.335 -332 -825.489 -331 1.426 -331 -16.181 -331 9.864 -331 -813.692 -330 1.524 -330 -14.441 -330 9.943 -330 -802.08 -329 2.151 -329 -12.371 -329 10.552 -329 -790.155 -328 1.791 -328 -10.18 -328 10.173 -328 -778.129 -327 1.313 -327 -8.379 -327 9.677 -327 -766.511 -326 1.298 -326 -6.821 -326 9.642 -326 -755.154 -325 1.309 -325 -5.269 -325 9.635 -325 -743.823 -324 1.568 -324 -3.586 -324 9.875 -324 -732.38 -323 1.666 -323 -1.729 -323 9.954 -323 -720.782 -322 1.825 -322 0.266 -322 10.094 -322 -709.064 -321 2.286 -321 2.559 -321 10.536 -321 -697.067 -320 2.237 -320 5.057 -320 10.468 -320 -684.885 -319 2.372 -319 7.596 -319 10.584 -319 -672.68 -318 1.973 -318 10.01 -318 10.166 -318 -660.62 -317 2.051 -317 12.276 -317 10.224 -317 -648.726 -316 2.238 -316 14.642 -316 10.393 -316 -636.752 -315 1.306 -315 16.641 -315 9.441 -315 -625.163 -314 0.808 -314 17.972 -314 8.924 -314 -614.262 -313 1.385 -313 19.329 -313 9.482 -313 -603.354 -312 1.79 -312 21.143 -312 9.868 -312 -592.008 -311 1.615 -311 23.091 -311 9.673 -311 -580.548 -310 2.145 -310 25.216 -310 10.184 -310 -568.93 -309 2.145 -309 27.581 -309 10.165 -309 -557.091 -308 1.581 -308 29.686 -308 9.582 -308 -545.532 -307 1.563 -307 31.508 -307 9.544 -307 -534.275 -306 1.379 -306 33.212 -306 9.34 -306 -523.155 -305 0.965 -305 34.644 -305 8.907 -305 -512.327 -304 1.602 -304 36.172 -304 9.524 -304 -501.422 -303 1.349 -303 37.867 -303 9.252 -303 -490.371 -302 0.855 -302 39.214 -302 8.738 -302 -479.685 -301 0.787 -301 40.288 -301 8.651 -301 -469.294 -300 0.785 -300 41.326 -300 8.63 -300 -458.958 -299 1.193 -299 42.567 -299 9.017 -299 -448.438 -298 1.662 -298 44.227 -298 9.467 -298 -437.519 -297 1.615 -297 46.103 -297 9.4 -297 -426.404 -296 1.865 -296 48.074 -296 9.63 -296 -415.214 -295 1.257 -295 49.866 -295 9.002 -295 -404.223 -294 0.971 -294 51.235 -294 8.696 -294 -393.674 -293 0.967 -293 52.437 -293 8.673 -293 -383.312 -292 0.25 -292 53.265 -292 7.936 -292 -373.345 -291 -0.883 -291 53.229 -291 6.783 -291 -364.261 -290 0.222 -290 53.21 -290 7.868 -290 -355.181 -289 2.411 -289 54.731 -289 10.036 -289 -344.579 -288 1.739 -288 56.985 -288 9.344 -288 -333.266 -287 0.909 -287 58.572 -287 8.494 -287 -322.639 -286 1.224 -286 59.898 -286 8.789 -286 -312.293 -285 1.257 -285 61.37 -285 8.802 -285 -301.822 -284 1.059 -284 62.777 -284 8.583 -284 -291.436 -283 1.42 -283 64.275 -283 8.924 -283 -280.98 -282 1.982 -282 66.221 -282 9.466 -282 -270.094 -281 2.53 -281 68.699 -281 9.993 -281 -258.699 -280 2.109 -280 71.232 -280 9.552 -280 -247.268 -279 1.288 -279 73.178 -279 8.711 -279 -236.443 -278 1.161 -278 74.661 -278 8.564 -278 -226.104 -277 1.096 -277 76.032 -277 8.478 -277 -215.895 -276 1.001 -276 77.324 -276 8.363 -276 -205.787 -275 0.99 -275 78.553 -275 8.331 -275 -195.762 -274 0.477 -274 79.526 -274 7.797 -274 -186.015 -273 0.295 -273 80.175 -273 7.595 -273 -176.612 -272 0.776 -272 80.966 -272 8.056 -272 -167.087 -271 1.203 -271 82.182 -271 8.461 -271 -157.157 -270 0.964 -270 83.493 -270 8.201 -270 -147.154 -269 0.677 -269 84.563 -269 7.894 -269 -137.412 -268 0.784 -268 85.557 -268 7.98 -268 -127.766 -267 1.57 -267 86.961 -267 8.745 -267 -117.732 -266 0.966 -266 88.443 -266 8.121 -266 -107.641 -265 0.381 -265 89.378 -265 7.515 -265 -98.118 -264 0.687 -264 90.179 -264 7.8 -264 -88.749 -263 1.31 -263 91.416 -263 8.402 -263 -78.966 -262 1.382 -262 92.981 -262 8.452 -262 -68.875 -261 0.909 -261 94.362 -261 7.959 -261 -58.99 -260 0.668 -260 95.402 -260 7.697 -260 -49.466 -259 0.648 -259 96.316 -259 7.655 -259 -40.09 -258 1.029 -258 97.406 -258 8.015 -258 -30.558 -257 1.504 -257 98.891 -257 8.469 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350.936 -214 2.482 -214 138.69 -214 8.499 -214 360.617 -213 0.699 -213 140.478 -213 6.693 -213 369.855 -212 -0.506 -212 140.845 -212 5.465 -212 377.649 -211 -0.933 -211 140.396 -211 5.014 -211 384.603 -210 -0.79 -210 139.827 -210 5.135 -210 391.414 -209 1.177 -209 140.269 -209 7.079 -209 399.214 -208 1.618 -208 141.847 -208 7.496 -208 408.126 -207 0.621 -207 143.179 -207 6.476 -207 416.769 -206 -0.362 -206 143.55 -206 5.47 -206 424.429 -205 -1.347 -205 142.959 -205 4.462 -205 431.102 -204 -1.326 -204 141.941 -204 4.46 -204 437.325 -203 1.354 -203 142.2 -203 7.116 -203 444.803 -202 1.532 -202 143.806 -202 7.27 -202 453.603 -201 0.392 -201 144.994 -201 6.107 -201 461.962 -200 -0.185 -200 145.364 -200 5.507 -200 469.48 -199 -0.15 -199 145.443 -199 5.518 -199 476.684 -198 -0.49 -198 145.371 -198 5.154 -198 483.712 -197 -0.186 -197 145.296 -197 5.435 -197 490.714 -196 0.478 -196 145.669 -196 6.075 -196 498.141 -195 0.066 -195 146.162 -195 5.639 -195 505.664 -194 -0.284 -194 146.291 -194 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145.813 -173 4.576 -173 653.894 -172 0.191 -172 145.917 -172 5.208 -172 660.472 -171 0.469 -171 146.463 -171 5.46 -171 667.467 -170 -0.116 -170 146.874 -170 4.852 -170 674.301 -169 -0.229 -169 146.946 -169 4.713 -169 680.773 -168 -0.688 -168 146.741 -168 4.229 -168 686.942 -167 -0.237 -167 146.55 -167 4.655 -167 693.1 -166 0.676 -166 146.984 -166 5.544 -166 699.858 -165 -0.199 -165 147.426 -165 4.643 -165 706.6 -164 -1.106 -164 147.012 -164 3.711 -164 712.46 -163 -2.18 -163 145.635 -163 2.613 -163 717.332 -162 -1.939 -162 143.9 -162 2.828 -162 721.821 -161 0.916 -161 143.633 -161 5.658 -161 727.754 -160 1.287 -160 144.9 -160 6.004 -160 735.193 -159 0.411 -159 145.973 -159 5.102 -159 742.416 -158 -0.07 -158 146.392 -158 4.596 -158 748.957 -157 -0.664 -157 146.285 -157 3.976 -157 754.948 -156 -0.275 -156 146.072 -156 4.34 -156 760.807 -155 -0.158 -155 146.09 -155 4.432 -155 766.872 -154 -0.125 -154 146.186 -154 4.439 -154 772.99 -153 -0.222 -153 146.256 -153 4.316 -153 779.055 -152 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