#measuring device: BESSY-NOM
#slope profile along central axis in medidional direction
#plane elliptical mirror Ell2 for beamline P04 at PETRA-III. energy range: 100-3000eV
#finishing: ion beam finishing
#scan length [mm]: 430
#dx [mm] :0.2
#Object-XSize :510
#Object-YSize :70
#residual slope [urad]: 0.5
#design parameter of ellipse: entrance arm: 7500mm; exit arm: 2500mm; angle of incidence 0.6deg
#x-position [mm]; y-slope [urad]
0.00	590.4027041
0.20	589.8452956
0.40	589.302276
0.60	588.7836951
0.80	588.2621667
1.00	587.7709043
1.20	587.2799473
1.40	586.7952007
1.60	586.304617
1.80	585.8071346
2.00	585.3462644
2.20	584.8269951
2.40	584.3148912
2.60	583.7974496
2.80	583.2865237
3.00	582.7329597
3.20	582.2012068
3.40	581.6834064
3.60	581.1603848
3.80	580.6398841
4.00	580.1456063
4.20	579.6352331
4.40	579.1176412
4.60	578.603249
4.80	578.0790251
5.00	577.5353752
5.20	577.0040878
5.40	576.4813716
5.60	575.9771844
5.80	575.4567516
6.00	574.9483176
6.20	574.4236476
6.40	573.8805262
6.60	573.3662988
6.80	572.8563426
7.00	572.2982505
7.20	571.7899765
7.40	571.2497396
7.60	570.6901641
7.80	570.1314999
8.00	569.59471
8.20	569.0378929
8.40	568.4898168
8.60	567.9768742
8.80	567.4053144
9.00	566.8365131
9.20	566.3061564
9.40	565.7355372
9.60	565.1632114
9.80	564.6495852
10.00	564.1217058
10.20	563.6230696
10.40	563.1225476
10.60	562.6365986
10.80	562.1662844
11.00	561.6909671
11.20	561.2327584
11.40	560.7313831
11.60	560.2334935
11.80	559.7527949
12.00	559.2624779
12.20	558.7725147
12.40	558.2864736
12.60	557.7706561
12.80	557.3005116
13.00	556.7990442
13.20	556.3247692
13.40	555.8521135
13.60	555.3500837
13.80	554.8874293
14.00	554.4155687
14.20	553.9381667
14.40	553.4582196
14.60	552.9403126
14.80	552.42051
15.00	551.8854314
15.20	551.3444431
15.40	550.7965464
15.60	550.24768
15.80	549.7230731
16.00	549.1642878
16.20	548.580351
16.40	547.9701672
16.60	547.3854936
16.80	546.806623
17.00	546.2670115
17.20	545.7672602
17.40	545.251753
17.60	544.7322462
17.80	544.249429
18.00	543.7484124
18.20	543.2165723
18.40	542.717558
18.60	542.165075
18.80	541.6165578
19.00	541.0833941
19.20	540.5726428
19.40	540.0461015
19.60	539.5182804
19.80	538.9563293
20.00	538.4152682
20.20	537.9003864
20.40	537.3725846
20.60	536.8398525
20.80	536.3157158
21.00	535.7882485
21.20	535.2703852
21.40	534.7298235
21.60	534.199142
21.80	533.6773469
22.00	533.1232642
22.20	532.5761868
22.40	532.0462034
22.60	531.484805
22.80	530.9647358
23.00	530.4191419
23.20	529.8851977
23.40	529.3677561
23.60	528.8418693
23.80	528.3403389
24.00	527.8458913
24.20	527.3804203
24.40	526.8886053
24.60	526.4040234
24.80	525.9174103
25.00	525.4408325
25.20	524.9612489
25.40	524.4759011
25.60	523.9614604
25.80	523.4219168
26.00	522.9430023
26.20	522.4498492
26.40	521.9406395
26.60	521.4333933
26.80	520.9127811
27.00	520.3886493
27.20	519.826097
27.40	519.2815988
27.60	518.7309823
27.80	518.202783
28.00	517.6437601
28.20	517.0529538
28.40	516.4458387
28.60	515.8444298
28.80	515.2672366
29.00	514.6697255
29.20	514.1048365
29.40	513.6034321
29.60	513.092225
29.80	512.6279418
30.00	512.1506319
30.20	511.6956617
30.40	511.1905001
30.60	510.6879322
30.80	510.1586178
31.00	509.6579891
31.20	509.1438975
31.40	508.6082129
31.60	508.1341124
31.80	507.5944379
32.00	507.0636934
32.20	506.5507556
32.40	506.0602253
32.60	505.5089204
32.80	504.9439539
33.00	504.4041388
33.20	503.8471763
33.40	503.3262151
33.60	502.7928381
33.80	502.2416399
34.00	501.6972968
34.20	501.1822356
34.40	500.6629275
34.60	500.1491461
34.80	499.6259112
35.00	499.0758959
35.20	498.5706616
35.40	497.9974486
35.60	497.4563633
35.80	496.9163931
36.00	496.3881405
36.20	495.8711013
36.40	495.3350821
36.60	494.8165934
36.80	494.3664324
37.00	493.8798337
37.20	493.3991255
37.40	492.8883159
37.60	492.3456648
37.80	491.7766453
38.00	491.2069811
38.20	490.6648098
38.40	490.1219259
38.60	489.595724
38.80	489.1196504
39.00	488.6401881
39.20	488.1617196
39.40	487.7097648
39.60	487.2181097
39.80	486.7031066
40.00	486.2034524
40.20	485.6577663
40.40	485.1642496
40.60	484.6672957
40.80	484.1160345
41.00	483.5450904
41.20	482.9904501
41.40	482.4154336
41.60	481.8646911
41.80	481.2991428
42.00	480.7424906
42.20	480.1632177
42.40	479.6049899
42.60	479.0681175
42.80	478.480346
43.00	477.9032885
43.20	477.3189542
43.40	476.7499299
43.60	476.1894963
43.80	475.6648797
44.00	475.1553597
44.20	474.6385484
44.40	474.1667604
44.60	473.7082753
44.80	473.2741224
45.00	472.8158555
45.20	472.3888
45.40	471.9160473
45.60	471.4026441
45.80	470.8968038
46.00	470.3749505
46.20	469.827461
46.40	469.2888192
46.60	468.7362538
46.80	468.185424
47.00	467.6673668
47.20	467.1210456
47.40	466.5773376
47.60	466.018945
47.80	465.4870466
48.00	464.9091166
48.20	464.3549417
48.40	463.783188
48.60	463.2095144
48.80	462.6160126
49.00	462.059627
49.20	461.5666096
49.40	461.0673868
49.60	460.5556804
49.80	460.0768192
50.00	459.5666545
50.20	459.0282502
50.40	458.5013695
50.60	457.9527262
50.80	457.3675872
51.00	456.7849497
51.20	456.2329612
51.40	455.6703508
51.60	455.0955429
51.80	454.5893002
52.00	454.030413
52.20	453.4570304
52.40	452.9241479
52.60	452.4088685
52.80	451.8739935
53.00	451.3464972
53.20	450.8392413
53.40	450.3117546
53.60	449.7935519
53.80	449.2978584
54.00	448.8030037
54.20	448.2748917
54.40	447.7597771
54.60	447.2414823
54.80	446.7386962
55.00	446.2484616
55.20	445.7768724
55.40	445.2676288
55.60	444.7400646
55.80	444.2619742
56.00	443.768569
56.20	443.247409
56.40	442.7451368
56.60	442.2079493
56.80	441.6825279
57.00	441.1715051
57.20	440.6305992
57.40	440.0800506
57.60	439.5250176
57.80	438.9744739
58.00	438.4500367
58.20	437.8987609
58.40	437.3665765
58.60	436.8513069
58.80	436.3109342
59.00	435.8214947
59.20	435.2710819
59.40	434.7493498
59.60	434.2497925
59.80	433.7231155
60.00	433.2150257
60.20	432.6596533
60.40	432.1432783
60.60	431.62972
60.80	431.1025776
61.00	430.5686964
61.20	430.0458008
61.40	429.5162683
61.60	428.964818
61.80	428.4070168
62.00	427.8145088
62.20	427.2522426
62.40	426.7275436
62.60	426.1522896
62.80	425.6025894
63.00	425.0505137
63.20	424.5219945
63.40	424.0087609
63.60	423.4673654
63.80	422.9573946
64.00	422.4499884
64.20	421.9355816
64.40	421.4069799
64.60	420.8871095
64.80	420.3689553
65.00	419.8415026
65.20	419.2942215
65.40	418.7698909
65.60	418.2502193
65.80	417.7327971
66.00	417.2034924
66.20	416.6636628
66.40	416.1377808
66.60	415.5751656
66.80	415.0601723
67.00	414.5905513
67.20	414.0924581
67.40	413.5608798
67.60	413.0367431
67.80	412.5113653
68.00	412.0028053
68.20	411.5108642
68.40	411.00132
68.60	410.5106588
68.80	410.034876
69.00	409.5116944
69.20	408.9945146
69.40	408.5077803
69.60	407.9871778
69.80	407.4528264
70.00	406.9415224
70.20	406.4390029
70.40	405.9178672
70.60	405.4018412
70.80	404.8774524
71.00	404.3149681
71.20	403.7505058
71.40	403.1950898
71.60	402.6584841
71.80	402.0990976
72.00	401.5601842
72.20	401.0259879
72.40	400.4654088
72.60	399.9713346
72.80	399.4591919
73.00	398.9095063
73.20	398.3746943
73.40	397.8101302
73.60	397.2721767
73.80	396.7307569
74.00	396.20551
74.20	395.6784112
74.40	395.1117334
74.60	394.5320144
74.80	394.0264261
75.00	393.5118061
75.20	393.0275685
75.40	392.521287
75.60	391.9799496
75.80	391.4453025
76.00	390.8846507
76.20	390.3178807
76.40	389.7321259
76.60	389.1916321
76.80	388.6468623
77.00	388.1213149
77.20	387.5956366
77.40	387.0813947
77.60	386.5806447
77.80	386.0745717
78.00	385.5556903
78.20	385.0218334
78.40	384.5099524
78.60	383.9769003
78.80	383.4451377
79.00	382.9257278
79.20	382.3946779
79.40	381.8788944
79.60	381.3190909
79.80	380.8383584
80.00	380.3598317
80.20	379.8671246
80.40	379.388438
80.60	378.9001668
80.80	378.3712645
81.00	377.8684688
81.20	377.3478372
81.40	376.793769
81.60	376.2683233
81.80	375.7223804
82.00	375.1792977
82.20	374.6680179
82.40	374.126443
82.60	373.5946271
82.80	373.03877
83.00	372.5114142
83.20	371.965927
83.40	371.4084603
83.60	370.8350485
83.80	370.2725642
84.00	369.7031811
84.20	369.1220029
84.40	368.5636636
84.60	368.0014265
84.80	367.4150463
85.00	366.8756724
85.20	366.3751261
85.40	365.8729557
85.60	365.3696848
85.80	364.8711941
86.00	364.3540046
86.20	363.8342069
86.40	363.3184379
86.60	362.7752582
86.80	362.2165262
87.00	361.6162711
87.20	361.0478674
87.40	360.4508313
87.60	359.8718735
87.80	359.3107514
88.00	358.7693122
88.20	358.2050292
88.40	357.6627804
88.60	357.1331122
88.80	356.6179249
89.00	356.0721759
89.20	355.5757068
89.40	355.081298
89.60	354.5636771
89.80	354.0870508
90.00	353.5819764
90.20	353.1078905
90.40	352.5832012
90.60	352.0463773
90.80	351.5003422
91.00	350.9235611
91.20	350.3465424
91.40	349.7194924
91.60	349.1182823
91.80	348.520805
92.00	347.9289079
92.20	347.3363805
92.40	346.7629299
92.60	346.1724241
92.80	345.585312
93.00	345.0181008
93.20	344.486886
93.40	343.9413261
93.60	343.4257752
93.80	342.9609441
94.00	342.4950465
94.20	341.9943159
94.40	341.4849414
94.60	340.9684597
94.80	340.4297645
95.00	339.8870746
95.20	339.3405692
95.40	338.7490987
95.60	338.149944
95.80	337.5579839
96.00	336.9903558
96.20	336.4455666
96.40	335.9264622
96.60	335.3975987
96.80	334.8751346
97.00	334.3926956
97.20	333.8645884
97.40	333.3684877
97.60	332.8409914
97.80	332.3026646
98.00	331.7418043
98.20	331.2247069
98.40	330.705205
98.60	330.1608133
98.80	329.6458345
99.00	329.0943406
99.20	328.5542346
99.40	328.0214443
99.60	327.4841453
99.80	326.9252533
100.00	326.4070554
100.20	325.8563226
100.40	325.2689002
100.60	324.7152101
100.80	324.1181304
101.00	323.5405494
101.20	322.9680442
101.40	322.4180338
101.60	321.8714315
101.80	321.340304
102.00	320.8312106
102.20	320.2875996
102.40	319.7653439
102.60	319.2185622
102.80	318.674636
103.00	318.1531851
103.20	317.6205984
103.40	317.1041216
103.60	316.5916492
103.80	316.1021272
104.00	315.5899651
104.20	315.0903254
104.40	314.5839276
104.60	314.095157
104.80	313.5417627
105.00	312.9777367
105.20	312.4021773
105.40	311.8373998
105.60	311.2548253
105.80	310.6795665
106.00	310.0993773
106.20	309.5601827
106.40	309.0212742
106.60	308.51763
106.80	308.0228819
107.00	307.4590934
107.20	306.9106877
107.40	306.3545494
107.60	305.8023428
107.80	305.2094178
108.00	304.5910748
108.20	304.0133484
108.40	303.4319762
108.60	302.8510258
108.80	302.2642045
109.00	301.6955486
109.20	301.1438608
109.40	300.6057279
109.60	300.0550485
109.80	299.5122228
110.00	298.9717629
110.20	298.4711341
110.40	297.9471575
110.60	297.3952757
110.80	296.8431757
111.00	296.2861357
111.20	295.7302155
111.40	295.1947539
111.60	294.655254
111.80	294.1370076
112.00	293.6143787
112.20	293.1074621
112.40	292.6356305
112.60	292.1508887
112.80	291.6624042
113.00	291.1713066
113.20	290.6347785
113.40	290.1018087
113.60	289.5334971
113.80	288.9643176
114.00	288.3807106
114.20	287.7926336
114.40	287.2149896
114.60	286.6721348
114.80	286.1210287
115.00	285.6115669
115.20	285.1018191
115.40	284.5815026
115.60	284.0461041
115.80	283.4924285
116.00	282.891039
116.20	282.2984582
116.40	281.7300642
116.60	281.1662466
116.80	280.6048288
117.00	280.0400417
117.20	279.4621989
117.40	278.9402486
117.60	278.4282077
117.80	277.9114497
118.00	277.3898825
118.20	276.8446861
118.40	276.3249611
118.60	275.7826978
118.80	275.1812016
119.00	274.6046386
119.20	274.032531
119.40	273.4466744
119.60	272.8936
119.80	272.3627828
120.00	271.8716416
120.20	271.3792206
120.40	270.8668306
120.60	270.3488654
120.80	269.8118088
121.00	269.2648478
121.20	268.6731785
121.40	268.1041445
121.60	267.5365649
121.80	266.9851534
122.00	266.4501814
122.20	265.9468717
122.40	265.4119337
122.60	264.8669846
122.80	264.3058916
123.00	263.7095973
123.20	263.1038591
123.40	262.4679906
123.60	261.8391953
123.80	261.2102982
124.00	260.603474
124.20	259.9889852
124.40	259.4098528
124.60	258.8600314
124.80	258.3425559
125.00	257.81712
125.20	257.2663241
125.40	256.7518398
125.60	256.2671416
125.80	255.740547
126.00	255.2032917
126.20	254.6975047
126.40	254.20456
126.60	253.6971053
126.80	253.1825241
127.00	252.6775079
127.20	252.1927176
127.40	251.6909981
127.60	251.2051606
127.80	250.6965812
128.00	250.1373547
128.20	249.5677971
128.40	249.005274
128.60	248.4262773
128.80	247.8298521
129.00	247.2371356
129.20	246.6474976
129.40	246.0799035
129.60	245.5422554
129.80	245.0032693
130.00	244.4481346
130.20	243.8722503
130.40	243.3330606
130.60	242.782895
130.80	242.2268682
131.00	241.6644227
131.20	241.102171
131.40	240.5422028
131.60	239.9487979
131.80	239.3661022
132.00	238.7946442
132.20	238.2341718
132.40	237.685446
132.60	237.0900001
132.80	236.4916503
133.00	235.9075632
133.20	235.3192197
133.40	234.7547573
133.60	234.2043203
133.80	233.6865005
134.00	233.1982342
134.20	232.7198481
134.40	232.2634138
134.60	231.7868796
134.80	231.2903087
135.00	230.7862185
135.20	230.2736782
135.40	229.7491149
135.60	229.1934953
135.80	228.6429564
136.00	228.1083239
136.20	227.5480696
136.40	226.9743815
136.60	226.4245795
136.80	225.8710543
137.00	225.3113139
137.20	224.7906241
137.40	224.2753448
137.60	223.764797
137.80	223.2488583
138.00	222.7067695
138.20	222.1771498
138.40	221.6315074
138.60	221.0428535
138.80	220.4561292
139.00	219.8390321
139.20	219.2348986
139.40	218.6401556
139.60	218.0524326
139.80	217.449991
140.00	216.8799438
140.20	216.3333415
140.40	215.7562695
140.60	215.2286374
140.80	214.7099208
141.00	214.1933809
141.20	213.6853396
141.40	213.2271794
141.60	212.762358
141.80	212.2863814
142.00	211.8112725
142.20	211.2904616
142.40	210.7599983
142.60	210.2389061
142.80	209.6794033
143.00	209.114684
143.20	208.5798624
143.40	208.0291683
143.60	207.486299
143.80	206.9243964
144.00	206.3413129
144.20	205.7675133
144.40	205.2482586
144.60	204.7640258
144.80	204.269365
145.00	203.7924575
145.20	203.3542856
145.40	202.9101651
145.60	202.4095994
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