#measuring device: BESSY-NOM
#slope profile along central axis in medidional direction
#plane ellipse at BESSY-II. energy range: 100-2000eV
#finishing: ion beam finishing
#scan length [mm]: 131.5
#dx [mm] :0.2
#Object-XSize :150
#Object-YSize :30
#residual slope [urad]: 0.5
#design parameter of ellipse: entrance arm 9000mm; exit arm: 350mm; angle of incidence: 2.5deg
#x-position [mm]; y-slope [urad]
10.00	4169.7852
10.50	4143.66851
11.00	4117.596325
11.50	4091.649873
12.00	4065.665267
12.50	4039.592432
13.00	4013.335528
13.50	3986.974261
14.00	3960.474104
14.50	3934.212488
15.00	3908.185729
15.50	3882.184693
16.00	3855.926984
16.50	3829.433246
17.00	3803.061629
17.50	3776.724263
18.00	3750.286505
18.50	3723.635299
19.00	3697.046845
19.50	3670.389623
20.00	3643.750134
20.50	3617.047912
21.00	3590.256943
21.50	3563.34428
22.00	3536.485439
22.50	3509.495794
23.00	3482.178593
23.50	3454.759629
24.00	3427.500091
24.50	3400.28196
25.00	3373.104745
25.50	3345.565255
26.00	3317.809354
26.50	3290.285508
27.00	3263.00891
27.50	3235.570554
28.00	3207.671118
28.50	3179.589059
29.00	3151.612933
29.50	3123.622913
30.00	3095.789202
30.50	3068.066947
31.00	3040.345249
31.50	3012.415877
32.00	2984.339762
32.50	2956.468789
33.00	2928.808685
33.50	2900.854598
34.00	2872.620273
34.50	2844.076461
35.00	2815.690209
35.50	2787.434964
36.00	2759.375346
36.50	2731.205126
37.00	2702.727858
37.50	2673.929662
38.00	2644.946882
38.50	2616.140382
39.00	2587.540032
39.50	2558.977904
40.00	2530.144177
40.50	2501.370017
41.00	2472.622187
41.50	2443.891659
42.00	2415.047227
42.50	2386.178958
43.00	2356.97528
43.50	2327.47744
44.00	2297.813071
44.50	2268.480247
45.00	2239.375526
45.50	2210.145877
46.00	2180.509942
46.50	2150.61569
47.00	2120.74182
47.50	2090.895379
48.00	2061.194868
48.50	2031.467538
49.00	2001.825097
49.50	1971.938093
50.00	1941.75238
50.50	1911.686053
51.00	1881.818243
51.50	1852.006834
52.00	1821.739781
52.50	1791.269699
53.00	1760.84464
53.50	1730.525359
54.00	1700.305351
54.50	1669.900062
55.00	1639.389601
55.50	1608.671393
56.00	1577.734647
56.50	1547.028467
57.00	1516.557982
57.50	1485.925017
58.00	1454.884286
58.50	1423.585482
59.00	1392.179221
59.50	1361.060782
60.00	1330.118984
60.50	1299.229909
61.00	1268.206296
61.50	1236.684804
62.00	1204.627157
62.50	1172.698568
63.00	1141.182142
63.50	1109.858186
64.00	1078.213559
64.50	1046.324492
65.00	1014.442405
65.50	982.6354188
66.00	950.8533464
66.50	919.0988979
67.00	887.0911026
67.50	854.7612741
68.00	822.3023191
68.50	790.0069405
69.00	758.0334157
69.50	725.978081
70.00	693.5791442
70.50	660.8531905
71.00	628.0992735
71.50	595.4035519
72.00	562.7945998
72.50	530.1276122
73.00	497.3058426
73.50	464.2370723
74.00	430.9266242
74.50	397.7708565
75.00	364.8484957
75.50	331.8676875
76.00	298.5057683
76.50	264.961157
77.00	231.3299944
77.50	197.8170745
78.00	164.363339
78.50	130.849338
79.00	97.2568285
79.50	63.45677611
80.00	29.42004437
80.50	-4.574490384
81.00	-38.39108899
81.50	-72.21320462
82.00	-106.3254149
82.50	-140.6920336
83.00	-175.0310236
83.50	-209.2375469
84.00	-243.5109774
84.50	-277.9541121
85.00	-312.5734523
85.50	-347.3429059
86.00	-382.3633308
86.50	-417.2739581
87.00	-451.8770284
87.50	-486.382043
88.00	-521.310511
88.50	-556.6931251
89.00	-592.1891485
89.50	-627.4838684
90.00	-662.7698328
90.50	-698.1137744
91.00	-733.6446306
91.50	-769.3331584
92.00	-805.2364138
92.50	-841.0815174
93.00	-876.6941836
93.50	-912.3782949
94.00	-948.4638399
94.50	-984.797491
95.00	-1021.014654
95.50	-1057.051996
96.00	-1093.06819
96.50	-1129.337872
97.00	-1165.849958
97.50	-1202.620555
98.00	-1239.598137
98.50	-1276.611429
99.00	-1313.359807
99.50	-1350.056855
100.00	-1387.050217
100.50	-1424.355485
101.00	-1461.62464
101.50	-1498.788109
102.00	-1535.980122
102.50	-1573.214401
103.00	-1610.604155
103.50	-1648.211211
104.00	-1685.978929
104.50	-1723.768547
105.00	-1761.293167
105.50	-1798.854686
106.00	-1836.842649
106.50	-1875.185549
107.00	-1913.556436
107.50	-1951.744762
108.00	-1989.94119
108.50	-2028.239086
109.00	-2066.791235
109.50	-2105.668738
110.00	-2144.606953
110.50	-2183.500237
111.00	-2222.162387
111.50	-2260.843522
112.00	-2299.899505
112.50	-2339.341126
113.00	-2378.86687
113.50	-2418.320723
114.00	-2457.515548
114.50	-2496.931247
115.00	-2536.493016
115.50	-2576.105506
116.00	-2616.029304
116.50	-2656.120713
117.00	-2696.086636
117.50	-2735.996405
118.00	-2776.182398
118.50	-2816.689459
119.00	-2857.349117
119.50	-2897.737606
120.00	-2938.154281
120.50	-2978.781869
121.00	-3019.692769
121.50	-3060.635186
122.00	-3101.919901
122.50	-3142.9683
123.00	-3183.901176
123.50	-3224.794414
124.00	-3266.175866
124.50	-3308.014955
125.00	-3349.933007
125.50	-3391.602532
126.00	-3433.152161
126.50	-3475.039598
127.00	-3517.215472
127.50	-3559.428734
128.00	-3601.862473
128.50	-3644.137121
129.00	-3686.161829
129.50	-3728.232798
130.00	-3770.734292
130.50	-3813.782894
131.00	-3856.738215
131.50	-3899.43251